Berkeley Process Control wins third U.S. patent

Richmond, Calif. - Berkeley Process Control, Inc. (Berkeley) announced November 5 that its third U.S. patent for Autocalibration technology has issued.


Richmond, Calif. - Berkeley Process Control, Inc. (Berkeley) announced November 5 that its third U.S. patent for Autocalibration technology has issued. Building on earlier Berkeley intellectual property, this patent describes the company's Self-Teaching Robotic Carrier Handling System.

'This third patent expands the applicability of Autocalibration technology to wafer carrier and 300mm FOUP buffers,' said Berkeley president Paul Sagues. 'Buffers are utilized to maximize the productivity of semiconductor fabrication tools. Autocalibration technology in such buffers speeds commissioning and maintenance, reduces downtime, and lowers total cost of ownership.'

Berkeley's Autocalibration technology eliminates the time consuming and subjective manual calibration of robots and gantries required during semiconductor tool installation, configuration, and maintenance.

Using Berkeley's latest, fifth generation motion and machine control platform called the BXi and a variety of application-specific methods, Autocalibration technology allows a robot or gantry to locate system objects without the need for operator or technician assistance. Conventional manual calibration requires a specially qualified technician to physically intrude into an ultra-clean semiconductor tool to subjectively calibrate it.

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