Gas valve manifold for semiconductor box applications

Festo's VTOC pilot gas valve manifold has configurations for up to 24 valve positions as well as configurable manifold rails and choices of pneumatic outlets.


Festo's VTOC pilot gas valve manifold has configurations for up to 24 valve positions as well as configurable manifold rails and choices of pneumatic outlets. Courtesy: FestoFesto's VTOC pilot gas valve manifold is designed for space-limited semiconductor gas box applications. The VTOC valve manifold can be ordered in configurations from 2 to 24 valve positions, giving OEMs the flexibility to order a manifold best suited to available gas box real estate.

These manifolds are designed for 2 x 3/2 valves, enabling a 24 valve position manifold to accommodate up to 48 solenoid coils. Valve airflow is 10 normal liters (NI)/minute. An online configuration tool helps OEMs quickly select the best option for the gas box application. All units are tested and ready to install on delivery.

VTOC options include: Configurable manifold rails (pneumatic and electric connections), multi-pin plug connection with sub-D plug or flat ribbon cable, valve with non-detenting manual override, and choices of pneumatic outlets – push-in connectors, straight, or angled. Also optional are individual contacts for each coil – separate commons – and diodes to ensure the current is in only one direction. This can be used to increase safety in user circuits.


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