High-precision vertical lift stage

Pittsburgh, PA —ANT-4V High-Precision Vertical Lift Stage provides high speed (50 mm/s), accuracy (200 nm), and in-position stability in one compact package. It also offers 2-nm resolution when combined with the company's MXH multiplier. Unique ANT stages use advanced direct-drive technology (patent pending) and high-accuracy direct position feedback to achieve the highest positioning pe...

10/01/2002



Pittsburgh, PA - ANT-4V High-Precision Vertical Lift Stage provides high speed (50 mm/s), accuracy (200 nm), and in-position stability in one compact package. It also offers 2-nm resolution when combined with the company's MXH multiplier. Unique ANT stages use advanced direct-drive technology (patent pending) and high-accuracy direct position feedback to achieve the highest positioning performance. ANT-4V offers 'several times higher' throughput advantage over conventional screw- or piezo-based vertical stages, according to the company. These stages are designed for continual operation and require no maintenance.

Aerotech Inc. www.aerotech.com





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