Infrared temperature sensor can see into a vacuum chamber
The PyroMini 0.9 infrared pyrometer from Calex Electronics can view into a vacuum chamber through a quartz or glass window and measure the temperature of the surface of the silicon wafer and it can take repeatable measurements continuously for long periods.
The PyroMini 0.9 infrared pyrometer from Calex Electronics can view into a vacuum chamber through a quartz or glass window and measure the temperature of the surface of the silicon wafer. Temperature ranges from 350 C to 2,000 C are available, and the low-temperature 350 C to 800 C model is designed for temperature monitoring and control in silicon wafer processing. Stable and repeatable measurements can be taken continuously for long periods. The optional MicroSD Card allows over a year of data to be logged even at the fastest sample rate of one reading per second. The miniature sensing head is made of stainless steel 316 and is sealed to IP65. Cable lengths up to 30 m are available. The electronics module has an optional touch screen and features a visual alarm indicator as well as full sensor configuration. Available outputs includes a 4-20 mA or RS485 Modbus output and it has two alarm relays on touch screen models that could be connected to alarm equipment directly, without a separate trip amplifier.
Calex Electronics
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