Inline process refractometer boosts wafer fab QC

PR-23-M real-time process refractometer from K-Patents measures the concentrations of process liquids in semiconductor fabrication plants. Instrument features inert non-metallic materials on all wetted parts for compatibility with ultra-pure chemicals; it is said to deliver continuous and accurate measurement.

06/07/2006


PR-23-M real-time process refractometer from K-Patents measures the concentrations of process liquids in semiconductor fabrication plants. Instrument features inert non-metallic materials on all wetted parts for compatibility with ultra-pure chemicals; it is said to deliver continuous and accurate measurement.

Process Control

PR-23-M refractometer from K-Patents determines the concentration of dissolved solids by making an optical measurement of a solution's refractive index.

Device provides an alarm if a chemical composition is not within programmed specifications. It is intended for preventing out-of-spec chemicals from entering the semiconductor process. All-purpose transmitter can be used to measure concentrations of all kinds of process liquids, including HF, HCl, KOH, IPA, PGMEA, NMP, NH4OH, C2H6O2, and CH3COCH. It installs directly into the process pipeline and provides a continuous 4-20 mA or digital measurement signal.

Measurement is based on the company's optical measurement sensor, which uses a solid-state charged-couple-device camera to provide a digital measurement of refractive index. Measurement accuracy is

— Jeanine Katzel, senior editor, Control Engineering,
jkatzel@reedbusiness.com





No comments
The Engineers' Choice Awards highlight some of the best new control, instrumentation and automation products as chosen by...
The System Integrator Giants program lists the top 100 system integrators among companies listed in CFE Media's Global System Integrator Database.
The Engineering Leaders Under 40 program identifies and gives recognition to young engineers who...
This eGuide illustrates solutions, applications and benefits of machine vision systems.
Learn how to increase device reliability in harsh environments and decrease unplanned system downtime.
This eGuide contains a series of articles and videos that considers theoretical and practical; immediate needs and a look into the future.
System integration: Best practices and technologies to help; Virtualization virtues; Cyber security advice; Motor system efficiency, savings; Product exclusives; Road to Hannover
Collaborative robotics: How to improve safety, return on investment; Industrial Internet of Things, Industrie 4.0: World views; High-performance HMI, Information Integration: OPC and OMG
9 tips: How to integrate a servo system; Process control mathematical models; Serial network grounding; Engineers' Choice Awards; Learn from cyber security mistakes
This article collection contains several articles on the Industrial Internet of Things (IIoT) and how it is transforming manufacturing.
PLCs, robots, and the quest for a single controller; how OEE is key to automation solutions.
Learn how Industry 4.0 adds supply chain efficiency, optimizes pricing, improves quality, and more.

Find and connect with the most suitable service provider for your unique application. Start searching the Global System Integrator Database Now!

Getting to the bottom of subsea repairs: Older pipelines need more attention, and operators need a repair strategy; OTC preview; Offshore production difficult - and crucial
Digital oilfields: Integrated HMI/SCADA systems enable smarter data acquisition; Real-world impact of simulation; Electric actuator technology prospers in production fields
Special report: U.S. natural gas; LNG transport technologies evolve to meet market demand; Understanding new methane regulations; Predictive maintenance for gas pipeline compressors
click me