Inline process refractometer boosts wafer fab QC

PR-23-M real-time process refractometer from K-Patents measures the concentrations of process liquids in semiconductor fabrication plants. Instrument features inert non-metallic materials on all wetted parts for compatibility with ultra-pure chemicals; it is said to deliver continuous and accurate measurement.

06/07/2006


PR-23-M real-time process refractometer from K-Patents measures the concentrations of process liquids in semiconductor fabrication plants. Instrument features inert non-metallic materials on all wetted parts for compatibility with ultra-pure chemicals; it is said to deliver continuous and accurate measurement.

Process Control

PR-23-M refractometer from K-Patents determines the concentration of dissolved solids by making an optical measurement of a solution's refractive index.

Device provides an alarm if a chemical composition is not within programmed specifications. It is intended for preventing out-of-spec chemicals from entering the semiconductor process. All-purpose transmitter can be used to measure concentrations of all kinds of process liquids, including HF, HCl, KOH, IPA, PGMEA, NMP, NH4OH, C2H6O2, and CH3COCH. It installs directly into the process pipeline and provides a continuous 4-20 mA or digital measurement signal.

Measurement is based on the company's optical measurement sensor, which uses a solid-state charged-couple-device camera to provide a digital measurement of refractive index. Measurement accuracy is

— Jeanine Katzel, senior editor, Control Engineering,
jkatzel@reedbusiness.com





No comments
The Engineers' Choice Awards highlight some of the best new control, instrumentation and automation products as chosen by...
The System Integrator Giants program lists the top 100 system integrators among companies listed in CFE Media's Global System Integrator Database.
Each year, a panel of Control Engineering and Plant Engineering editors and industry expert judges select the System Integrator of the Year Award winners in three categories.
This eGuide illustrates solutions, applications and benefits of machine vision systems.
Learn how to increase device reliability in harsh environments and decrease unplanned system downtime.
This eGuide contains a series of articles and videos that considers theoretical and practical; immediate needs and a look into the future.
Additive manufacturing benefits; HMI and sensor tips; System integrator advice; Innovations from the industry
Robotic safety, collaboration, standards; DCS migration tips; IT/OT convergence; 2017 Control Engineering Salary and Career Survey
Integrated mobility; Artificial intelligence; Predictive motion control; Sensors and control system inputs; Asset Management; Cybersecurity
Featured articles highlight technologies that enable the Industrial Internet of Things, IIoT-related products and strategies to get data more easily to the user.
This article collection contains several articles on how automation and controls are helping human-machine interface (HMI) hardware and software advance.
This digital report will explore several aspects of how IIoT will transform manufacturing in the coming years.

Find and connect with the most suitable service provider for your unique application. Start searching the Global System Integrator Database Now!

Infrastructure for natural gas expansion; Artificial lift methods; Disruptive technology and fugitive gas emissions
Mobility as the means to offshore innovation; Preventing another Deepwater Horizon; ROVs as subsea robots; SCADA and the radio spectrum
Future of oil and gas projects; Reservoir models; The importance of SCADA to oil and gas
Automation Engineer; Wood Group
System Integrator; Cross Integrated Systems Group
Jose S. Vasquez, Jr.
Fire & Life Safety Engineer; Technip USA Inc.
This course focuses on climate analysis, appropriateness of cooling system selection, and combining cooling systems.
This course will help identify and reveal electrical hazards and identify the solutions to implementing and maintaining a safe work environment.
This course explains how maintaining power and communication systems through emergency power-generation systems is critical.
click me