Micro-sensor for ultra-low gas flow applications

Thermal mass device from Innovative Sensor Technology reads very low velocities.

07/13/2010


Innovative Sensor Technology (IST) has developed its new MFS02 micro flow sensor that utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultra sensitive polymer membrane. The company says this new sensor is capable of measuring thermal mass flow of gases in a range from 0.001 to 2 m/s (up to 50 m/s), and has a chip temperature range of -40 to +150 °C.

Micro flow sensor from ISTUsing the same thin-film construction philosophy as IST’s FS series flow sensors, the MFS02 employs a special glass substrate with an ultra thin polymer membrane to achieve extreme sensitivity. IST characterizes the polymer as having outstanding thermal, mechanical, and chemical behaviors, with reduced thermal conductivity of the polymer membrane allowing better thermal contrast and thus better sensitivity. Additionally, the sensor’s glass substrate allows for a much higher operating temperature, making the measurement of larger flow rates possible.

-----------------------------------------------------------------------------

 

40 Under 40 – Control Engineering: Know someone working in automation under age 40 in need of some recognition? See the 40 Under 40 awards.

-----------------------------------------------------------------------------

IST’s micro-flow sensor allows customers to specify dimensions and resistor layouts to fit their own applications. The MFS02 features a rugged design that is well-suited for soldering, conductive gluing, or wire bonding. The sensor element can be mounted as an assembly on an electronic PCB or other carrier, and is ideal for mounting in a bypass flow assembly for differential pressure applications. An evaluation kit is available for user testing.

Watch a demonstration of much less sophisticated thermal mass flow technology in a basement video at the Control Engineering YouTube channel.

Edited by Peter Welander, pwelander@cfemedia.com

Control Engineering

Visit the Process Control Channel.



No comments
The Engineers' Choice Awards highlight some of the best new control, instrumentation and automation products as chosen by...
The System Integrator Giants program lists the top 100 system integrators among companies listed in CFE Media's Global System Integrator Database.
The Engineering Leaders Under 40 program identifies and gives recognition to young engineers who...
This eGuide illustrates solutions, applications and benefits of machine vision systems.
Learn how to increase device reliability in harsh environments and decrease unplanned system downtime.
This eGuide contains a series of articles and videos that considers theoretical and practical; immediate needs and a look into the future.
Integrated mobility; Artificial intelligence; Predictive motion control; Sensors and control system inputs; Asset Management; Cybersecurity
Big Data and IIoT value; Monitoring Big Data; Robotics safety standards and programming; Learning about PID
Motor specification guidelines; Understanding multivariable control; Improving a safety instrumented system; 2017 Engineers' Choice Award Winners
This digital report will explore several aspects of how IIoT will transform manufacturing in the coming years.
Motion control advances and solutions can help with machine control, automated control on assembly lines, integration of robotics and automation, and machine safety.
This article collection contains several articles on the Industrial Internet of Things (IIoT) and how it is transforming manufacturing.

Find and connect with the most suitable service provider for your unique application. Start searching the Global System Integrator Database Now!

Mobility as the means to offshore innovation; Preventing another Deepwater Horizon; ROVs as subsea robots; SCADA and the radio spectrum
Future of oil and gas projects; Reservoir models; The importance of SCADA to oil and gas
Big Data and bigger solutions; Tablet technologies; SCADA developments
Automation Engineer; Wood Group
System Integrator; Cross Integrated Systems Group
Jose S. Vasquez, Jr.
Fire & Life Safety Engineer; Technip USA Inc.

(copy 5)

click me