Micro-sensor for ultra-low gas flow applications

Thermal mass device from Innovative Sensor Technology reads very low velocities.


Innovative Sensor Technology (IST) has developed its new MFS02 micro flow sensor that utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultra sensitive polymer membrane. The company says this new sensor is capable of measuring thermal mass flow of gases in a range from 0.001 to 2 m/s (up to 50 m/s), and has a chip temperature range of -40 to +150 °C.

Micro flow sensor from ISTUsing the same thin-film construction philosophy as IST’s FS series flow sensors, the MFS02 employs a special glass substrate with an ultra thin polymer membrane to achieve extreme sensitivity. IST characterizes the polymer as having outstanding thermal, mechanical, and chemical behaviors, with reduced thermal conductivity of the polymer membrane allowing better thermal contrast and thus better sensitivity. Additionally, the sensor’s glass substrate allows for a much higher operating temperature, making the measurement of larger flow rates possible.



40 Under 40 – Control Engineering: Know someone working in automation under age 40 in need of some recognition? See the 40 Under 40 awards.


IST’s micro-flow sensor allows customers to specify dimensions and resistor layouts to fit their own applications. The MFS02 features a rugged design that is well-suited for soldering, conductive gluing, or wire bonding. The sensor element can be mounted as an assembly on an electronic PCB or other carrier, and is ideal for mounting in a bypass flow assembly for differential pressure applications. An evaluation kit is available for user testing.

Watch a demonstration of much less sophisticated thermal mass flow technology in a basement video at the Control Engineering YouTube channel.

Edited by Peter Welander, pwelander@cfemedia.com

Control Engineering

Visit the Process Control Channel.

No comments
The Engineers' Choice Awards highlight some of the best new control, instrumentation and automation products as chosen by...
The System Integrator Giants program lists the top 100 system integrators among companies listed in CFE Media's Global System Integrator Database.
The Engineering Leaders Under 40 program identifies and gives recognition to young engineers who...
This eGuide illustrates solutions, applications and benefits of machine vision systems.
Learn how to increase device reliability in harsh environments and decrease unplanned system downtime.
This eGuide contains a series of articles and videos that considers theoretical and practical; immediate needs and a look into the future.
Choosing controllers: PLCs, PACs, IPCs, DCS? What's best for your application?; Wireless trends; Design, integration; Manufacturing Day; Product Exclusive
Variable speed drives: Smooth, efficient, electrically quite motion control; Process control upgrades; Mobile intelligence; Product finalists: Vote now; Product Exclusives
Machine design tips: Pneumatic or electric; Software upgrades; Ethernet advantages; Additive manufacturing; Engineering Leaders; Product exclusives: PLC, HMI, IO
This article collection contains the 5 most referenced articles on improving the use of PID.
Learn how Industry 4.0 adds supply chain efficiency, optimizes pricing, improves quality, and more.

Find and connect with the most suitable service provider for your unique application. Start searching the Global System Integrator Database Now!

Cyber security cost-efficient for industrial control systems; Extracting full value from operational data; Managing cyber security risks
Drilling for Big Data: Managing the flow of information; Big data drilldown series: Challenge and opportunity; OT to IT: Creating a circle of improvement; Industry loses best workers, again
Pipeline vulnerabilities? Securing hydrocarbon transit; Predictive analytics hit the mainstream; Dirty pipelines decrease flow, production—pig your line; Ensuring pipeline physical and cyber security

(copy 5)