Motion platform for positioning applications
Griffin’s CXY-BS Series 150mm precision XY motion platform is ideal for use in microscopy, inspection, wafer processing, microtiter plate processing, laser marking, and optical positioning applications.
Griffin’s CXY-BS Series 150mm precision XY motion platform is ideal for use in microscopy, inspection, wafer processing, microtiter plate processing, laser marking, and optical positioning applications. This ball-screw-drive stage exhibits levels of orthogonality and parallelism, enabling 150mm of precise XY travel with 10µm linear accuracy and 1µm linear repeatability. The platform can attain linear velocities of up to 150mm/sec, which is useful for factory automation and semiconductor processing equipment. It also features an integrated brushless servomotor that is directly coupled to zero backlash precision ground ball screws. The ball screws provide operation and velocity control, and this configuration allows for both tighter control loops and a smaller overall footprint than stages with motor couplings. The platform also features crossed roller bearings, a high resolution (0.1µm) linear SS scale encoder, optical limit switches, and optional brakes for safety.
Griffin Motion
www.griffionmotion.com
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