Nanopositioners for precision applications
Aerotech's QNP-XY piezo nanopositioner series is designed for precision applications and features travel ranges from 100 μm to 600 μm as well as a capacitive sensor.
Aerotech's QNP-XY series of piezo nanopositioners are designed to provide resolution, linearity, repeatability, and high dynamics required for precision applications like microscopy and optics alignment. The XY series has resolution to 0.15 nm, linearity to 0.007%, and repeatability to 2 nm for nanometer-level precision. It has a travel range of 100 μm to 600 μm and has an optional closed-loop feedback option using a capacitive sensor design for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly for strong accuracy and repeatability. The capacitance sensor also has an open-loop option, which is designed for applications where compact size, high-dynamics, and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source.
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