Network-based motion, machine control system for semiconductor tools

Richmond, Calif.— Berkeley Process Control Inc. has introduced the BXi controller reported to be the industry's first integrated motion and machine control system designed specifically for automated semiconductor process tools. It features eight internally powered servo axes, an expandable 100 Mbit Ethernet I/O system and an object-based development environment.

09/01/1999


Richmond, Calif.— Berkeley Process Control Inc. has introduced the BX i controller reported to be the industry's first integrated motion and machine control system designed specifically for automated semiconductor process tools. It features eight internally powered servo axes, an expandable 100 Mbit Ethernet I/O system and an object-based development environment. Its RISC-based processor core drives the system, which enables BX i to control virtually all servo motor driven wafer handling equipment. The company was able to eliminate a large amount of complex wiring and needless user integration effort by combining internally powered servo motion and logic in a small package and adding an Ethernet connection. The controller measures approximately 10 x 3 x 8 in. with no point-to-point wiring required, no control panel to build, and no low-level software to write. Berkeley Process Control Inc.





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