Precise measurement for flow rates below 100 ml/min.

The small, highly sensitive, MEMS-based Sensirion flowmeter has a response time of less than 50 ms.


Sensirion AG has launched a flow sensor for flow rates below 100 ml/min. SLQ-HC60 fills a gap in the company’s existing range of products for precise measurement in the low millimeter range. The water-resistant flowmeter operates without moving parts and provides high reliability and media compatibility.

Flow rates below 100 ml/min can be measured for a range of media. The detection of bubbles in the microliter range is possible. The small, highly sensitive, MEMS-based flowmeter enables precise measurement of dynamic flow rates with a response time of less than 50 ms.

The process sensor requires a supply voltage of 24 V and provides a 0-10 V analog output signal. Media separation ensures that liquids only get into contact with glass, PEEK, and Tefzel during the measuring process. The simple, straight-flow channel can be connected to 1/8-in. or 3-mm plastic hoses via threaded couplings.

Sensirion AG

Also read: Product research on flowmeters .

– Edited by Renee Robbins , senior editor
Control Engineering News Desk
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