Semiconductor machine productivity compounded with XY positioning

Airglide LED Wafer System from Dover Motion is a maintenance-free positioning platform available with wider base for increased stiffness over travels up to 1 meter.

04/23/2011


The Airglide LED Wafer System from Dover is available in a wide base version for additional stiffness and support for larger payloads up to 110 lb, over travels up to 3 ft. Combined with, high accuracy and velocity stability while scanning, the Airglide system is a maintenance-free positioning solution for stepping or scanning applications, and is suited for laser processing of LED or semiconductor wafers. Other applications include metrology or precision imaging systems which require high accuracy step positioning moves.

“The Airglide platform is flexible in its ability to be setup as an individual precision axis, or stacked as an XY assembly. Further, it uses ultra-precision air bearing ways to deliver clean and accurate positioning that, combined with zero-maintenance operation, maximizes system reliability which is vital for high throughput applications,” says John Garrity, Business Development Manager, Dover. “Users will find that the Airglide XY configuration is ideally suited to applications that require precise steps combined with velocity stability while scanning. Its straightness of motion makes it a perfect platform to be integrated into tools for LED and semiconductor laser processing and inspection.”

The Airglide system deliver straightness to ±0.5 µm, compensated accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending upon the payload, it can accelerate at 16 ft/s2, provide maximum velocity of 40 in/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 4 to 40 in. The system can be operated with industry-standard servo drive control hardware, or packaged with a Dover control solution to deliver custom positioning performance.

Available options include complete motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When configured in a vertical orientation for use as a Z axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling is also available for customer-enabling technology or additional axes.

www.dovermotion.com

Dover

- Edited by Gust Gianos, Control Engineering, www.controleng.com



No comments
The Engineers' Choice Awards highlight some of the best new control, instrumentation and automation products as chosen by...
Each year, a panel of Control Engineering editors and industry expert judges select the System Integrator of the Year Award winners.
Control Engineering Leaders Under 40 identifies and gives recognition to young engineers who...
Learn more about methods used to ensure that the integration between the safety system and the process control...
Adding industrial toughness and reliability to Ethernet eGuide
Technological advances like multiple-in-multiple-out (MIMO) transmitting and receiving
Big plans for small nuclear reactors: Simpler, safer control designs; Smarter manufacturing; Industrial cloud; Mobile HMI; Controls convergence
Virtualization advice: 4 ways splitting servers can help manufacturing; Efficient motion controls; Fill the brain drain; Learn from the HART Plant of the Year
Two sides to process safety: Combining human and technical factors in your program; Preparing HMI graphics for migrations; Mechatronics and safety; Engineers' Choice Awards
The Ask Control Engineering blog covers all aspects of automation, including motors, drives, sensors, motion control, machine control, and embedded systems.
Join this ongoing discussion of machine guarding topics, including solutions assessments, regulatory compliance, gap analysis...
News and comments from Control Engineering process industries editor, Peter Welander.
IMS Research, recently acquired by IHS Inc., is a leading independent supplier of market research and consultancy to the global electronics industry.
This is a blog from the trenches – written by engineers who are implementing and upgrading control systems every day across every industry.
Anthony Baker is a fictitious aggregation of experts from Callisto Integration, providing manufacturing consulting and systems integration.
Integrator Guide

Integrator Guide

Search the online Automation Integrator Guide
 

Create New Listing

Visit the System Integrators page to view past winners of Control Engineering's System Integrator of the Year Award and learn how to enter the competition. You will also find more information on system integrators and Control System Integrators Association.

Case Study Database

Case Study Database

Get more exposure for your case study by uploading it to the Control Engineering case study database, where end-users can identify relevant solutions and explore what the experts are doing to effectively implement a variety of technology and productivity related projects.

These case studies provide examples of how knowledgeable solution providers have used technology, processes and people to create effective and successful implementations in real-world situations. Case studies can be completed by filling out a simple online form where you can outline the project title, abstract, and full story in 1500 words or less; upload photos, videos and a logo.

Click here to visit the Case Study Database and upload your case study.