Semiconductor machine productivity compounded with XY positioning

Airglide LED Wafer System from Dover Motion is a maintenance-free positioning platform available with wider base for increased stiffness over travels up to 1 meter.

04/23/2011


The Airglide LED Wafer System from Dover is available in a wide base version for additional stiffness and support for larger payloads up to 110 lb, over travels up to 3 ft. Combined with, high accuracy and velocity stability while scanning, the Airglide system is a maintenance-free positioning solution for stepping or scanning applications, and is suited for laser processing of LED or semiconductor wafers. Other applications include metrology or precision imaging systems which require high accuracy step positioning moves.

“The Airglide platform is flexible in its ability to be setup as an individual precision axis, or stacked as an XY assembly. Further, it uses ultra-precision air bearing ways to deliver clean and accurate positioning that, combined with zero-maintenance operation, maximizes system reliability which is vital for high throughput applications,” says John Garrity, Business Development Manager, Dover. “Users will find that the Airglide XY configuration is ideally suited to applications that require precise steps combined with velocity stability while scanning. Its straightness of motion makes it a perfect platform to be integrated into tools for LED and semiconductor laser processing and inspection.”

The Airglide system deliver straightness to ±0.5 µm, compensated accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending upon the payload, it can accelerate at 16 ft/s2, provide maximum velocity of 40 in/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 4 to 40 in. The system can be operated with industry-standard servo drive control hardware, or packaged with a Dover control solution to deliver custom positioning performance.

Available options include complete motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When configured in a vertical orientation for use as a Z axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling is also available for customer-enabling technology or additional axes.

www.dovermotion.com

Dover

- Edited by Gust Gianos, Control Engineering, www.controleng.com



No comments
The Engineers' Choice Awards highlight some of the best new control, instrumentation and automation products as chosen by...
The System Integrator Giants program lists the top 100 system integrators among companies listed in CFE Media's Global System Integrator Database.
The Engineering Leaders Under 40 program identifies and gives recognition to young engineers who...
This eGuide illustrates solutions, applications and benefits of machine vision systems.
Learn how to increase device reliability in harsh environments and decrease unplanned system downtime.
This eGuide contains a series of articles and videos that considers theoretical and practical; immediate needs and a look into the future.
System integration: Best practices and technologies to help; Virtualization virtues; Cyber security advice; Motor system efficiency, savings; Product exclusives; Road to Hannover
Collaborative robotics: How to improve safety, return on investment; Industrial Internet of Things, Industrie 4.0: World views; High-performance HMI, Information Integration: OPC and OMG
9 tips: How to integrate a servo system; Process control mathematical models; Serial network grounding; Engineers' Choice Awards; Learn from cyber security mistakes
This article collection contains several articles on the Industrial Internet of Things (IIoT) and how it is transforming manufacturing.
PLCs, robots, and the quest for a single controller; how OEE is key to automation solutions.
Learn how Industry 4.0 adds supply chain efficiency, optimizes pricing, improves quality, and more.

Find and connect with the most suitable service provider for your unique application. Start searching the Global System Integrator Database Now!

Getting to the bottom of subsea repairs: Older pipelines need more attention, and operators need a repair strategy; OTC preview; Offshore production difficult - and crucial
Digital oilfields: Integrated HMI/SCADA systems enable smarter data acquisition; Real-world impact of simulation; Electric actuator technology prospers in production fields
Special report: U.S. natural gas; LNG transport technologies evolve to meet market demand; Understanding new methane regulations; Predictive maintenance for gas pipeline compressors
click me