Semiconductor machine productivity compounded with XY positioning

Airglide LED Wafer System from Dover Motion is a maintenance-free positioning platform available with wider base for increased stiffness over travels up to 1 meter.


The Airglide LED Wafer System from Dover is available in a wide base version for additional stiffness and support for larger payloads up to 110 lb, over travels up to 3 ft. Combined with, high accuracy and velocity stability while scanning, the Airglide system is a maintenance-free positioning solution for stepping or scanning applications, and is suited for laser processing of LED or semiconductor wafers. Other applications include metrology or precision imaging systems which require high accuracy step positioning moves.

“The Airglide platform is flexible in its ability to be setup as an individual precision axis, or stacked as an XY assembly. Further, it uses ultra-precision air bearing ways to deliver clean and accurate positioning that, combined with zero-maintenance operation, maximizes system reliability which is vital for high throughput applications,” says John Garrity, Business Development Manager, Dover. “Users will find that the Airglide XY configuration is ideally suited to applications that require precise steps combined with velocity stability while scanning. Its straightness of motion makes it a perfect platform to be integrated into tools for LED and semiconductor laser processing and inspection.”

The Airglide system deliver straightness to ±0.5 µm, compensated accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending upon the payload, it can accelerate at 16 ft/s2, provide maximum velocity of 40 in/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 4 to 40 in. The system can be operated with industry-standard servo drive control hardware, or packaged with a Dover control solution to deliver custom positioning performance.

Available options include complete motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When configured in a vertical orientation for use as a Z axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling is also available for customer-enabling technology or additional axes.


- Edited by Gust Gianos, Control Engineering,

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