Brooks Automation acquires Zygo Corp.’s Automation Systems Group

Chelmsford, Mass. – Brooks Automation Inc. , a supplier of tool and factory hardware and software automation solutions for the global semiconductor industry, announced December 14, 2001 that it has completed the purchase of Zygo Corp’s Automation Systems Group. The group is a manufacturer of reticle automation systems including reticle sorters, reticle macro inspection systems, and reticle handling solutions for the semiconductor industry. The purchase method of accounting will be used to account for the cash transaction of approximately $11 million.

‘The Zygo Automation Systems acquisition is an important part of Brooks Automation’s strategy of supplying an integrated suite of lithography automation systems,’ said Robert J. Therrien, president and chief executive officer of Brooks Automation. ‘The cost of advanced photomask sets can now exceed $500,000, causing semiconductor manufacturers to turn increasingly towards automated reticle handling systems such as Zygo’s ZARIS product to eliminate problems that may be caused by manual operations. This acquisition will enable Brooks to provide a more complete solution for lithography automation, thus adding more value to our partnership with our customers.’

‘The Automation Systems Group’s reticle handling products are a strong addition to Brooks Automation’s growing portfolio of solutions for the lithography automation market. While this Group has had an excellent record of success as a part of the Zygo organization, the divestiture of the Group will enable Zygo to focus on the company’s core areas of high precision optics, optical, and fiber optic assemblies and high performance metrology instruments,’ said J. Bruce Robinson, president and chief executive officer of Zygo Corporation.

Zygo will retain their core automation business in Delray Beach, Florida for metrology integrated solutions and photonic and electronic module assembly.

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