Closed-loop piezo motor positioners for research and industrial applications
Physik Instrumente’s (PI) PIHera precision closed-loop XY piezo motor positioners are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact package for high stiffness and long lifetime. They feature positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages ideal for applications that require frictionless, vibration-free, positioning with high linearity. PIHera piezo stages have a temperature tolerance range of -20 to 80 C, which makes them useful for long-term research and industrial applications. The closed-loop piezo stages are also designed to repeatedly provide nanometer and sub-nanometer size steps, and their high stiffness and advanced control algorithms allow them to move and settle quickly within a few milliseconds.
Physik Instrumente (PI)
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