Digital mass flow controller

Bronkhorst High-Tech B.V. metal sealed mass flowmeters and controllers are designed specifically to meet the requirements of semiconductor manufacturers as well as other high-purity gas applications. Instruments feature high surface finish components and modular construction with metal-to-metal seals to eliminate sources of contamination and ensure long-term leak tightness. Nitrogen flow rate ranges start at 0.1 to 5 sccm with a maximum of 0.6 to 100 slm for standard units. Higher flows are available on request. These new offerings are equipped with on-board digital signal processing, and provide fast response with a settling time as short as 500 msec. Standard connectivity is RS-232 output and analog I/O; optional interface can also support Device-Net, Profibus DP, Modbus-RTU, or Flow-Bus protocols.

Bronkhorst www.bronkhorst.com

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