Digital piezo controller for nanopositioning applications
Physik Instrumente’s (PI) E-727 digital piezo controller is designed for multi-axis nanopositioning applications, such as 3-D imaging in super-resolution microscopy, laser beam steering, image stabilization in astronomy, and fast alignment applications such as used in fiber alignment and semiconductor CD testing. It features digital high-speed interfaces, such as SPI, Ethernet, and USB as well as three additional high-resolution analog inputs. Low noise 20-bit DAC & ADC converters provide high resolution and stability. Four integrated piezo power amplifiers with an output range of -30 to 130 V as well as circuitry for capacitive feedback sensors, piezoresistive sensors, and strain gauges are also featured. The digital servo provides PID control with two programmable notch filters for higher bandwidth by suppression of mechanical system resonances. An optional dynamic digital linearization (DDL) firmware eliminates phase lag and dynamic non-linearities at high operating frequencies. Applications include nanopositioning, nano-automation, semiconductor technology, photonics, bio-nano-technology, metrology, microscopy, micro-manipulation, including cleanroom applications.
Physik Instrumente (PI)
– Edited by CFE Media. See more Control Engineering CNC and motion control products.