Dual axis MEMS inclinometer sensor detects angular tilt

Turck dual axis inclinometer sensor for angular tilt detection.
By Control Engineering Staff December 10, 2008

Turck has released a dual axis inclinometer sensor for angular tilt detection. The sensors, which feature compact rectangular housings and are mountable atal system) device, which incorporates a micro-electro-mechanical capacitive element into the sensor that utilizes two parallel plate electrodes, one stationary and one attached to a spring-mass system. Movement causes acceleration that produces deflection in the non-stationary electrode, resulting in a measurable change in capacitance between the two plates that is proportional to the angle of deflection. The signals are conditioned to provide two analog outputs (0.1 to 4.9 V dc) or two current outputs (4-20 mA).