Gas valve manifold for semiconductor box applications
Festo’s VTOC pilot gas valve manifold is designed for space-limited semiconductor gas box applications. The VTOC valve manifold can be ordered in configurations from 2 to 24 valve positions, giving OEMs the flexibility to order a manifold best suited to available gas box real estate.
These manifolds are designed for 2 x 3/2 valves, enabling a 24 valve position manifold to accommodate up to 48 solenoid coils. Valve airflow is 10 normal liters (NI)/minute. An online configuration tool helps OEMs quickly select the best option for the gas box application. All units are tested and ready to install on delivery.
VTOC options include: Configurable manifold rails (pneumatic and electric connections), multi-pin plug connection with sub-D plug or flat ribbon cable, valve with non-detenting manual override, and choices of pneumatic outlets – push-in connectors, straight, or angled. Also optional are individual contacts for each coil – separate commons – and diodes to ensure the current is in only one direction. This can be used to increase safety in user circuits.
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