Lift stage with large aperture offers precise elevation of heavy loads
Aerotech’s AVS1000 series stages offer a solution for applications that require positioning of large or heavy loads over very small incremental movements in elevation above a horizontal plane. The low profile and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, laser machining applications, and more.
The AVS1000 series provides precise elevation of a load in a vertical plane using a moving-wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw into vertical elevation of the AVS1000 series tabletop. Excellent pitch and yaw characteristics over the length of travel minimize the impact of angular errors. AVS1000 performance includes exceptional resolution (5 nm) and accuracy (±1 µm), with the ability to apply this performance to large loads up to 135 kg.
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life, and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is assured. Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile.
The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS1000 series stages offer a lower profile, but the load can also be conveniently accessed from any side due to the large aperture. And by centering the payload over the bearings, there are no cantilevering effects.
The AVS1000 series includes Aerotech’s high performance NEMA 34 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion.
Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
The AVS1000 series specification data is available at the following link.
– Edited by Gust Gianos, Control Engineering, www.controleng.com