Linear piezo stages with nanometer resolution
Physik Instrumente’s (PI) P-620.1 to P-629.1 linear piezo positioners consist of 60 stages available in a wide variety of travel ranges and are designed for nano-biotechnology, metrology, and photonics applications. They are designed for long-term research and industrial applications and have an temperature tolerance range of -20 to 80°C. Flexure-guided piezo positioning stages deliver vibrationless motion and fast response. The lack of rolling elements means there is no bearing rumble to affect the uniformity or straightness of the linear motion. PIHera precision closed-loop single stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimized package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared to inferred metrology feedback – usually based on piezo resistive strain gauges, a technique also available from PI for low cost piezo nanopositioners. They have a positioning accuracy of 0.02%, which make them ideal for applications that require frictionless, vibration-free, positioning with high linearity.
Physik Instrumente (PI)
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