Mass flow controller monitors multiple variables

Unit controls gas flow precisely, even when pressure and temperature fluctuate.
By Control Engineering Staff March 19, 2009

Brooks Instrument has released its new B-Series mass flow controller , a family of mass flow products designed to be insensitive to fluctuations in pressure and temperature. Built on a standard 1.125 in. wide platform with a user interface and local digital display, Brooks says the B-Series provides a compact flow measurement and control solution that eliminates the need for costly temperature and pressure control devices and systems.

“The B-Series sets a new standard in gas mass flow control,” says Steve Kannengieszer, director of marketing for Brooks Instrument. “Whether you are flowing gas to a CVD (chemical vapor deposition) chamber, chemical research reactor, fuel cell test stand, or any other important flow control application, the quality of your results are only as good as the performance of your mass flow controller. The B-Series was designed to minimize sources of gas flow inaccuracy, giving our customers accuracy, fast response, stability, and robust resistance to flow variation due to pressure and temperature fluctuations.”

The B-Series actively measures line pressure and adjusts the control valve to stabilize flow and flow signal changes resulting from pressure fluctuations. In addition, the output of every B-Series mass flow controller is characterized over the full operating temperature range of the device, allowing measurement and control accuracy under any process or ambient temperature conditions. Internal self-diagnostic routines continuously check the health of the device and flash an alarm code on the interface in the event of a diagnostic fault.

Also read: Analyzing Critical Flow Measurements .

—Edited by Peter Welander, process industries editor, PWelander@cfemedia.com ,
Control Engineering Process Instrumentation & Sensors Monthly
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