Motion controller for air bearing positioning stages
Physik Instrumente’s (PI) A-81x motion controller is designed to handle 1, 2, or 4-axis of PIglide air bearing positioning stages. Equipped with ultra-low noise PWM drives, the A-81x controller integrates closed loop servo control, motor drives, and power supplies in a 19-in. rackmount design. High resolution incremental encoders with sine/cosine output and absolute encoders based on BiSS-C protocol are supported. Air bearing positioners are designed to deliver precise and vibration-free motion, with excellent velocity stability, and zero wear of mechanical components. They are designed for high precision applications such as metrology, photonics alignment, semiconductor, wafer inspection, laser marketing, flat panel display, precision scanning applications, and cleanroom applications.
Physik Instrumente (PI)
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