Nanosensor designed for vibration measurement, precision manufacturing applications

Queensgate's NX NanoSensor employs capacitance micrometry and is designed to measure changes in position to an atomic scale for applications such as vibration measurement, metrology, precision manufacturing, and precision beam steering.
By Queensgate December 28, 2015

Queensgate's NX NanoSensor employs capacitance micrometry and is designed to measure changes in position to an atomic scale for applications such as vibration measurement, metrology, precision manufacturing, and precision beam steering. Courtesy: Queensga

Queensgate’s NX NanoSensor employs capacitance micrometry and is designed to measure changes in position to an atomic scale. The non-contact position measuring system relies on two sensor plates-a target and a probe, which form a parallel plate capacitor. The NX NanoSensor is designed for applications such as stage feedback, vibration measurement, metrology, deformation measurements, precision manufacturing, drift measurement, precision beam steering, and microscopy. The NX NanoSensor position can be determined with a linearity to 0.02% and a bandwidth from 50Hz to 10KHz. The non-contact measurement and non-self-heating mechanism do not impact the values they are measuring, which allows for true nanoscale measurements. The NS2000 controller module, which works in tandem with the NX NanoSensor, measures any changes in the parallel plate capacitance and produces an analog voltage that is proportional to the difference in position of the target.

Queensgate Instruments 

www.nanopositioning.com 

– Edited by CFE Media. See more Control Engineering discrete sensor and vision products.

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