Parallel-kinematic piezo positioning stages
Aerotech’s QNP2 series of XY, parallel-kinematic, piezo positioning stages are designed to provide sub-nanometer resolution, high dynamics, and geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The QNP2 is designed for applications such as optical microscopy, scanning probe microscopy, x-ray transmission microscopy, and other applications where two-sided part access is required. QNP2 piezo stages employ a parallel-kinematic flexure and metrology design for multi-axis accuracy. High stiffness and resonant frequency are designed to enable exceptional process throughput and fast closed-loop response. All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage enabling 0.15 nm resolution, 0.01% linearity, and 1 nm bidirectional repeatability. An optional mounting plate allows direct mounting to English or metric breadboard optical tables, and a solid tabletop is available. QNP2 piezo stages are also offered in custom materials and vacuum-prepared versions.
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