Piezo scanner for alignment, microscopy applications
Physik Instrumente’s (PI) P-616 NanoCube XYZ piezo scanner is based on a parallel-kinematic design, with only one moving platform for all 3 axes, high precision, and dynamics and features capacitive feedback delivering 100µm travel range. It is designed for applications such as photonics alignment, microscopy, 3-D imaging, screening, surface analysis, and wafer inspection. The positioner is operated with PI’s E-727 digital servo piezo controller and has a software package that includes drivers for LabVIEW, dynamic libraries for Microsoft Windows and Linux, and MATLAB. Interfaces consist of USB, SPI, RS-232, and analog. Supported functions include Wave generator, data recorder, auto zero, and trigger I/O. The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA piezo actuators for strong performance and reliability.
Physik Instrumente (PI)
– Edited by CFE Media. See more Control Engineering CNC and motion control products.