Piezo scanner for alignment, microscopy applications

Physik Instrumente's (PI) P-616 NanoCube XYZ piezo scanner is based on a parallel-kinematic design and is designed for applications such as photonics alignment, microscopy, 3-D imaging, screening, surface analysis, and wafer inspection.
By Physik Instrumente (PI) October 6, 2016

Physik Instrumente's (PI) P-616 NanoCube XYZ piezo scanner is based on a parallel-kinematic design and is designed for applications such as photonics alignment, microscopy, 3-D imaging, screening, surface analysis, and wafer inspection. Courtesy: Physik IPhysik Instrumente’s (PI) P-616 NanoCube XYZ piezo scanner is based on a parallel-kinematic design, with only one moving platform for all 3 axes, high precision, and dynamics and features capacitive feedback delivering 100µm travel range. It is designed for applications such as photonics alignment, microscopy, 3-D imaging, screening, surface analysis, and wafer inspection. The positioner is operated with PI’s E-727 digital servo piezo controller and has a software package that includes drivers for LabVIEW, dynamic libraries for Microsoft Windows and Linux, and MATLAB. Interfaces consist of USB, SPI, RS-232, and analog. Supported functions include Wave generator, data recorder, auto zero, and trigger I/O. The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA piezo actuators for strong performance and reliability.

Physik Instrumente (PI)

www.pi-usa.us 

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