Piezo stages for 3-D positioning accuracy

Aerotech’s QNP3 series of XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics, and geometric performance in a compact three-degree-of-freedom (DoF) package. They come with a 40 x 40 mm clear aperture with closed-loop travels up to 100 x 100 x 10 µm. The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation. QNP3 piezo stages use a parallel-kinematic flexure and metrology design that is designed to ensure multi-axis accuracy, high stiffness, and long device life. The drive design minimizes X and Y yaw errors while still maintaining an Abbe-compliant metrology system.

Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors. QNP3 stages are available with closed or open-loop feedback. The capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01%, and single-digit nanometer repeatability.

Aerotech, Inc.

Precision Motion & Automation Company | Aerotech 

– Edited by CFE Media. See more Control Engineering CNC and motion control products.

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