Position/displacement system for stage positioning applications
Kaman Precision Products’ SMT 9700 position/displacement system is designed to provide high resolution noncontact position/displacement feedback of virtually any electrically conductive target. The SMT 9700 system is designed for optics positioning in photolithography equipment, XYZ stage positioning in atomic force microscopy, and spindle position in precision grinding applications. The SMT 9700 uses Kaman’s proven eddy current sensor technology and provides nanometer to sub-nanometer resolution in a small package size. Available with 13 standard sensor options, the SMT 9700 system also enables users to customize sensor type and configuration, cable length, calibration range and offset, as well as performance attributes, linearity, bandwidth, and temperature. The SMT 9700 is available in 1-, 2-, and 3-channel configurations. With the 3-channel option, all channels can work off the same frequency and be tuned together. Users can achieve considerable cost savings by reducing mounting costs and saving on machine space and tuning all 3 channels together.
Kaman Precision Products
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