Rotary motion stages for research, automation applications
Griffin Motion’s 360-deg continuous travel RTS-DD Series rotary motion stages are designed for use in a variety of laboratory, factory automation, and semiconductor processing applications such as inspection, laser marking and machining, optical positioning, wafer alignment, and rate table, pan-and-tilt, and beam steering operations. They feature strong platform angular accuracy (30arcsec), repeatability (3arcsec), and resolution (0.324arcsec), in addition to high angular velocity (480deg/s), and strong axial and radial run-out (5µm), and exemplary wobble (10arcsec).
RTS-DD Series rotary stages feature a compact design that helps minimize errors when used in conjunction with another motion axis. It also features a brushless direct-drive servo motor that eliminates backlash and improves reliability by eliminating sliding friction throughout the stage. The series also features a high-resolution optical encoder with a precision index mark for homing, and a 30mm through-bore to enable routing of vacuum or high voltage lines for a wide range of wafer chucks.
– Edited by CFE Media. See more Control Engineering CNC and motion control products.