Trikon orders Cimetrix connectivity software

Salt Lake City, – Cimetrix Inc . announced September 4 that Trikon Technologies selected its CIM300 and CIMConnect for use in its 300 mm plasma etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD) process tools. The software will provide standards-based communication for all Trikon’s 300 mm process tools used in the production of silicon integrated circuits, III-Vs, and optical waveguides.

”Our engineers continually look for new ways to provide our customers with the simplest, smartest solutions to industry challenges, while bringing greater reliability and lower cost-of-ownership,” stated John Macneil, vp of engineering at Trikon. ”After thorough evaluation, we selected Cimetrix’s communication software products for our process tools.’

”The transition to 300 mm wafer manufacturing relies on the process tools’ ability to communicate at multiple levels with the fab’s manufacturing execution system,” stated David Faulkner, executive vp of Cimetrix. “Without this vital link, the tool cannot give the necessary information required to integrate the tool into the process line or provide engineers with data to increase yields through higher tool efficiency. Our software has been proven in every major 300 mm fab to provide a solid line of communication out of the process tool to the manufacturing environment.”

CIM300 supports SEMI standards E39, E40, E87, E90, and E94 and can be used with existing GEM interfaces. Its modular architecture allows the equipment supplier the flexibility to implement one or more of the connectivity standards. CIM300 utilizes dynamically linked libraries instead of standard C-type libraries that provide for reduced integration time and the ability to quickly evolve when standards change or software is upgraded.

CIMConnect provides SECS/GEM tool connectivity protocols. The software is designed to anticipate web applications and has an infrastructure to allow publishing information to the Internet, an intranet, or an extranet, which will facilitate e-diagnostics. This technology will enable equipment producers to gain crucial data on tool performance and increase responsiveness to potential difficulties decreasing overall downtime.

Control Engineering Daily News Desk
Gary A. Mintchell, senior editor
gmintchell@reedbusiness.com

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