Voice Coil Stage offers sub-micron positioning
Equipment Solutions’ VCS-2020 Voice Coil Stage features a ¾ inch dia. aperture and cross roller voice coil stages are self contained, compact, and can be mounted in a horizontal or vertical axis. This compact voice coil stage is ideal for such micro-positioning applications as: Scanning interferometry, disk drive testing, auto focus systems, surface structure analysis, confocal microscopy, biotechnology, and semiconductor test equipment.
The voice coil stage, which measures a slim 4.60 in. by 2.96 in. by 3.18 in., is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller. The low inertia cross roller stage is integral to the standard threaded "C" lens mount and motor coil for tip/tilt free motion. Custom lens mounts are available. The voice coil motor is rated at 4 lbs. continuous force and 16 lbs. peak for 10 seconds and is clean room compatible. For easy integration into a new or existing application the VCS-10H Voice Coil Stage has multiple sets of mounting holes on several surfaces.
Equipment Solutions, Inc. (ESI)
– Edited by Gust Gianos, Control Engineering, www.controleng.com