Dr. Mathias Bach and Stefan Vorndran
Mechanical August 11, 2021
Active piezoelectric shims improve machine precision
Due to the piezo element’s high resolution down to the nanometer range, active shims cover applications in classical mechanical precision engineering as well as the alignment of optical components in astronomy, semiconductor manufacturing, and in materials research employing beamline instrumentation.
By Dr. Mathias Bach and Stefan Vorndran