Mass flow controllers for vacuum chambers

Alicat Scientific's MCE and MCV series of mass flow controllers are designed to ensure optimal coating environment in vacuum chambers and maintain product integrity in coating and sputtering processes.

11/03/2016


Alicat Scientific's MCE and MCV series of mass flow controllers are designed to ensure optimal coating environment in vacuum chambers and maintain product integrity in coating and sputtering processes. Courtesy: Alicat Scientific

Alicat Scientific's MCE and MCV series of mass flow controllers are designed to ensure optimal coating environment in vacuum chambers and maintain product integrity in coating and sputtering processes. The MCE-Series and MCV-Series can be used to replace legacy and discontinued instruments and accurately control gas flow rates as low as 0 to 0.5 sccm full scale or as high as 0 to 20 slpm full scale with control response times of 50 to 100 ms. The mass flow controllers operate on universal 12-30 Vdc supply, and the units can be mounted in any orientation, even upside-down, without recalibration, further simplifying installations. Pre-programmed with calibrations for 98 gases, the MCE and MCV measure mass flow, volumetric flow, absolute pressure and temperature, with full temperature and pressure compensation. Units may be programmed directly through the instrument keypad or remotely via RS-232 (RS-485 also available). The MCE and MCV use patented laminar flow differential pressure (DP) technology, are supplied with NIST traceable certification, and carry the CE mark.

Alicat Scientific

www.alicat.com 

- Edited by CFE Media. See more Control Engineering process sensor and actuator products.



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