New vacuum gauge controller

Boulder, Colo.— The Vacuum Products Group of MKS Instruments has released its new HPS PDR9000—a vacuum gauge controller that will provide power and readout for convection and cold cathode transducers. Its compact size, portability, and ease of installation allows it analyze problems, such as pressure discrepancies.

09/01/1999


Boulder, Colo.— The Vacuum Products Group of MKS Instruments has released its new HPS PDR9000—a vacuum gauge controller that will provide power and readout for convection and cold cathode transducers. Its compact size, portability, and ease of installation allows it analyze problems, such as pressure discrepancies. It can also be used in leak detection, since both sensors are gas sensitive, locating medium to fine leaks in a vacuum system. The vacuum measurement range is from 3 x 10-10to 1,000 Torr. The vacuum gauge can also be used for semiconductor systems because of its rapid response to pump down; repeatable measurements and variety of communication for improved process control; rugged sensor filament design for high reliability; and sensors designed for use in harsh process environments. MKS Instruments Inc.





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