Miniature hexapod for dynamic error correction
Physik Instrumente’s (PI) P-915KWEF is a miniature hexapod designed for dynamic error correction for six degrees of freedom in all three linear and rotation axes at sub-micron precision with a load capacity of 1500g. The parallel-kinematic design with piezo actuator direct drives results in a compact and stiff positioning solution. It can be mounted inside rotary stages to eliminate wobble and eccentricity errors and can be adapted to other long travel positioning systems for improved multi-axis motion accuracy. The capacitance direct metrology sensors provide absolute, sub-nanometer precision position feedback with high bandwidth. The P-915KWEF is designed for mechanical manufacturing and machining applications such as axial runout optimization, vibration insulation and fine adjustment.
Physik Instrumente (PI)
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